Figure 1 shows the cross-sectional structure of the PS pressure sensor,
Figure 4 shows an example of the peripheral circuit design of a PS pressure sensor,
The sensor uses an alumina membrane and a base plate arranged close to each other to form a capacitor.
Structural diagram of capacitive intake manifold pressure sensor 2
Identification of Semiconductor Varistor-Type Intake Air Pressure Sensor
Figure 2 Working Principle of the Varistor-type Intake Manifold Pressure Sensor